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We provide services to those who would like to try the CLIP package out or who would rather focus his/her time on other important things. For accurate results, a model characterization need to be performed before any of the following  runs. 

Density Map
 

a. You provide

a layout file in GDSII format.

    You get

layout density distribution and a color layout density contour map.

b. You provide

1) a layout file in GDSII format. 

2) your process data ( SEM pictures are  preferred).

    You get

post-CMP film pattern density distribution and color contour map.

 
CMP Simulation

   

You provide

1) a layout file in GDSII format.

    

2) your process data ( SEM pictures are  preferred).
You get 1) post-CMP film pattern density distribution and color contour map.

2) time dependent variation of key parameters such as Total Indicated Range (TIR), ILD variations and step heights.

 
Dummy Fill

  

You provide

1) a layout file in GDSII format.

    

2) your process data ( SEM pictures are  preferred).
3) dummy fill rule such as where dummy is allowed/not allowed and allowed dummy sizes.
You get 1) post-CMP film pattern density distribution and color contour map.

2) time dependent variation of key parameters such as Total Indicated  Range (TIR), ILD variations and step heights.

3) Dummy performance expressed by density distribution function.
4) Smart dummy layer in GDSII format.

 

 

 

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Revised: March 20, 2005