Density Calculator

Pattern density map of a HDP film from a 0.25um production die.

The pattern density calculator gives pattern density mapping of a die from its GDS layout file and the step coverage of the conformal deposited film. It is also capable of calculating the effective pattern density for HDP film.

Key Benefits

	Can be used for CMP density rule checking or enforcement.
	Can be used for debugging process.
	Cost only a fraction of the full package.

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