Publications
Chip-level CMP modeling and smart dummy for HDP and conformal CVD films
,
Proceedings of CMP-MIC
, 2/11/1999, by G. Liu etc.
http://banyan.cie.rpi.edu/~evolve/evolve_tutorial/activities/cmp.htm
http://buffy.eecs.berkeley.edu/IRO/Summary/00abstracts/rchang.1.html
Media
http://www.fabtech.org/
http://www.semiweb.com/
Solution provider
http://www.cmptechnology.com/
http://www.cadwalk.de/
http://www.srconsult.com/
Search engines
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Others
http://www.imic.org/
http://www.tekguide.net/
